Pulsed Laser System with Variable Pulse Duration for Laser Annealing
نویسندگان
چکیده
منابع مشابه
Dense-plasma Dynamics during Pulsed Laser Annealing
The flow of energy from the laser to the lattice during pulsed laser annealing of Si is examined, with particular attention paid to the influence of the dense'plasma of hot, photoexcited carriers on-the manner in which this energy transfer occurs. Consideration of carrier thermalization and recombination at high carrier densities suggests that under certain conditions carrier diffusion may incr...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 2013
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.41.12_1031